Fabricating microfluidic valve master molds in SU-8 photoresist

Author: Dy Aaron J   Cosmanescu Alin   Sluka James   Glazier James A   Stupack Dwayne   Amarie Dragos  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.5, 2014-05, pp. : 57001-57007

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