Author： Khater M E Al-Ghamdi M Park S Stewart K M E Abdel-Rahman E M Penlidis A Nayfeh A H Abdel-Aziz A K S Basha M
Publisher： IOP Publishing
ISSN： 0960-1317
Source： Journal of Micromechanics and Microengineering, Vol.24, Iss.6, 2014-06, pp. : 65007-65015
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Related content
By Kocache Ray
Sensor Review, Vol. 14, Iss. 1, 1994-01 ,pp. :
Access to resources
Recommend
MEMS sensors: past, present and future
By Bogue Robert
Sensor Review, Vol. 27, Iss. 1, 2007-01 ,pp. :
By Moseley P. T. Tofield B. C.
Materials Science and Technology, Vol. 1, Iss. 7, 1985-07 ,pp. :
Sensor Review, Vol. 31, Iss. 1, 2011-01 ,pp. :