Author: Gajasinghe R W R L Senveli S U Rawal S Williams A Zheng A Datar R H Cote R J Tigli O
Publisher: IOP Publishing
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.7, 2014-07, pp. : 75010-75020
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