Author: Li Jia-dong Cheng Jun-jie Miao Bin Wei Xiao-wei Xie Jie Zhang Jin-cheng Zhang Zhi-qiang Wu Dong-min
Publisher: IOP Publishing
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.7, 2014-07, pp. : 75023-75028
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