Micromachined contactless pin-flange adapter for robust high-frequency measurements

Author： Rahiminejad S   Pucci E   Haasl S   Enoksson P  

Publisher： IOP Publishing

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.24, Iss.8, 2014-08, pp. : 84004-84015

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