Author: Heidari Amir Chan Mei-Lin Yang Hsueh-An Jaramillo Gerardo Taheri-Tehrani Parsa Fonda Peter Najar Hadi Yamazaki Kazuo Lin Liwei Horsley David A
Publisher: IOP Publishing
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.8, 2014-08, pp. : 89501-89501
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