Observation of multiple charge states and high ion energies in high-power impulse magnetron sputtering (HiPIMS) and burst HiPIMS using a LaB6 target

Author： Franz Robert   Clavero César   Bolat Rustem   Mendelsberg Rueben   Anders André  

Publisher： IOP Publishing

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.23, Iss.3, 2014-06, pp. : 35001-35011

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