Global (volume-averaged) model of inductively coupled chlorine plasma: Influence of Cl wall recombination and external heating on continuous and pulse-modulated plasmas

Author: Kemaneci Efe   Carbone Emile   Booth Jean-Paul   Graef Wouter     Kroesen Gerrit  

Publisher: IOP Publishing

ISSN: 0963-0252

Source: Plasma Sources Science and Technology, Vol.23, Iss.4, 2014-08, pp. : 45002-45015

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