Experimental and theoretical study of an improved breakdown voltage SOI LDMOS with a reduced cell pitch

Author： Xiaorong Luo   Xiaowei Wang   Gangyi Hu   Yuanhang Fan   Kun Zhou   Yinchun Luo   Ye Fan   Zhengyuan Zhang   Yong Mei   Bo Zhang  

Publisher： IOP Publishing

ISSN： 1674-4926

Source： Journal of Semiconductors, Vol.35, Iss.2, 2014-02, pp. : 24007-24011

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