Comparison of Dynamic Simulations with RBS Measurements of Low Energy Ion Implantation of Sb⁺ into SiO₂/Si Substrates

Author： Ignatova Velislava A. Wätjen Vwe Katardjiev Illia V. Chakarov Ivan R.

ISSN： 0026-3672

Source： Microchimica Acta, Vol.145, Iss.1-4, 2004-04, pp. : 67-74

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