Spatial Resolution of a Wavelength-Dispersive Electron Probe Microanalyzer Equipped with a Thermal Field Emission Gun

Author： Kimura Takashi   Nishida Kenji   Tanuma Shigeo  

Publisher： Springer Publishing Company

ISSN： 0026-3672

Source： Microchimica Acta, Vol.155, Iss.1-2, 2006-09, pp. : 175-178

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