A wavelength-dispersive arrangement for wafer analysis with total reflection X-ray fluorescence spectrometry using synchrotron radiation

Author: Schwenke H.   Beaven P.A.   Knoth J.   Jantzen E.  

Publisher: Elsevier

ISSN: 0584-8547

Source: Spectrochimica Acta Part B: Atomic Spectroscopy, Vol.58, Iss.12, 2003-12, pp. : 2039-2048

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