Electron Probe Microanalysis of HfO2 Thin Films on Conductive and Insulating Substrates

Author： Lulla Marina   Asari Jelena   Aarik Jaan   Kukli Kaupo   Rammula Raul   Tapper Unto   Kauppinen Eero   Sammelselg Väino  

Publisher： Springer Publishing Company

ISSN： 0026-3672

Source： Microchimica Acta, Vol.155, Iss.1-2, 2006-09, pp. : 195-198

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