Planarization and Processing of Metamorphic Buffer Layers Grown by Hydride Vapor-Phase Epitaxy

Author: Zutter Brian   Schulte Kevin   Kim Tae   Mawst Luke   Kuech T.   Foran Brendan   Sin Yongkun  

Publisher: Springer Publishing Company

ISSN: 1543-186X

Source: Journal of Electronic Materials, Vol.43, Iss.4, 2014-04, pp. : 873-878

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