Performance analysis of an integrated piezoelectric ZnO sensor for detection of head–disk contact

Author: Yuan Yanhui   Du Hejun   Chow Kun   Zhang Mingsheng   Yu Shengkai   Liu Bo  

Publisher: Springer Publishing Company

ISSN: 0946-7076

Source: Microsystem Technologies, Vol.19, Iss.9-10, 2013-09, pp. : 1449-1455

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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