Design and control of a single-stage dual-actuator system for high-precision manufacturing

Author： Kim Michael   Lee Kwang-Hee   Nam Kyung-Tae   Lee Sang-Moo  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.20, Iss.2, 2014-02, pp. : 175-183

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