Author： Shiohara Suguru Chikae Miyuki Ukita Yoshiaki Ushijima Hiromi Fukumura Yasukazu Takamura Toshinari Takamura Yuzuru
Publisher： Springer Publishing Company
ISSN： 0946-7076
Source： Microsystem Technologies, Vol.20, Iss.2, 2014-02, pp. : 273-279
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