Microfabrication of thin film temperature sensor for cryogenic measurement

Author: Jiang Shui-Dong   Liu Jing-Quan   Yang Bin   Zhu Hong-Ying   Yang Chun-Sheng  

Publisher: Springer Publishing Company

ISSN: 0946-7076

Source: Microsystem Technologies, Vol.20, Iss.3, 2014-03, pp. : 451-456

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