Lock-in amplifier powered analogue Q-control circuit for self-actuated self-sensing piezoelectric MEMS resonators

Author: Kucera M.   Hofbauer F.   Wistrela E.   Manzaneque T.   Ruiz-Díez V.   Sánchez-Rojas J.   Bittner A.   Schmid U.  

Publisher: Springer Publishing Company

ISSN: 0946-7076

Source: Microsystem Technologies, Vol.20, Iss.4-5, 2014-04, pp. : 615-625

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