Author: Schwerter M. Beutel T. Leester-Schädel M. Büttgenbach S. Dietzel A.
Publisher: Springer Publishing Company
ISSN: 0946-7076
Source: Microsystem Technologies, Vol.20, Iss.4-5, 2014-04, pp. : 821-829
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.