Effects of Bragg reflector annealing on performance factors of FBAR‐based ultramass‐sensitive sensors

E-ISSN： 1098-2760|57|9|2134-2137

ISSN： 0895-2477

Source： MICROWAVE AND OPTICAL TECHNOLOGY LETTERS, Vol.57, Iss.9, 2015-09, pp. : 2134-2137

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