Detection in the nanometer scale of particles generated in anAr-SiH4 radiofrequency low pressure discharge

Publisher： Edp Sciences

E-ISSN： 1286-4838|19|C1|C1-185-C1-186

ISSN： 0003-4169

Source： Annales de Physique, Vol.19, Iss.C1, 1994-10, pp. : C1-185-C1-186

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