Study of dislocations in strained-Si/Si0.8Ge0.2 heterostructures by EBIC, TEM and etching techniques

Author: Yuan X. L.   Sekiguchi T.   Ri S. G.   Ito S.  

Publisher: Edp Sciences

E-ISSN: 1286-0050|27|1-3|337-340

ISSN: 1286-0042

Source: EPJ Applied Physics (The), Vol.27, Iss.1-3, 2010-03, pp. : 337-340

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Abstract