AFM and XRD studies of GaAs surface after anisotropic etching

Author: Dmitruk N. L.   Kladko V. P.   Konakova R. V.   Karimov A. V.  

Publisher: Edp Sciences

E-ISSN: 1286-0050|27|1-3|407-409

ISSN: 1286-0042

Source: EPJ Applied Physics (The), Vol.27, Iss.1-3, 2010-03, pp. : 407-409

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Abstract