3D analysis of buried interfaces using interference microscopy

Author: Benatmane A.   Montgomery P. C.  

Publisher: Edp Sciences

E-ISSN: 1286-0050|27|1-3|411-414

ISSN: 1286-0042

Source: EPJ Applied Physics (The), Vol.27, Iss.1-3, 2010-03, pp. : 411-414

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Abstract