Treatment of flat and hollow substrates by a pure nitrogen flowing post discharge

Author: Villeger S.   Sarrette J. P.   Rouffet B.   Cousty S.   Ricard A.  

Publisher: Edp Sciences

E-ISSN: 1286-0050|42|1|25-32

ISSN: 1286-0042

Source: EPJ Applied Physics (The), Vol.42, Iss.1, 2007-12, pp. : 25-32

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Abstract