High density plasma enhanced chemical vapor deposition of optical thin films

Author： Daineka D.   Bulkin P.   Girard G.   Bourée J.-E.   Drévillon B.  

Publisher： Edp Sciences

E-ISSN： 1286-0050|26|1|3-9

ISSN： 1286-0042

Source： EPJ Applied Physics (The), Vol.26, Iss.1, 2004-03, pp. : 3-9

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