Non-destructive optical methods for assessing defects in production of Si or SiGe materials

Author： Higgs V.   Laurent N.   Fellous C.   Dutarte D.  

Publisher： Edp Sciences

E-ISSN： 1286-0050|27|1-3|43-48

ISSN： 1286-0042

Source： EPJ Applied Physics (The), Vol.27, Iss.1-3, 2010-03, pp. : 43-48

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