Plasma etching of organic material: Combined effects of charged and neutral species

Author: Murillo R.   Poncin-Epaillard F.   Segui Y.  

Publisher: Edp Sciences

E-ISSN: 1286-0050|37|3|299-305

ISSN: 1286-0042

Source: EPJ Applied Physics (The), Vol.37, Iss.3, 2007-02, pp. : 299-305

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Abstract