A simple model for the deposition of W-O coatings by reactive gas pulsing process

Author: Parreira N. M. G.   Polcar T.   Carvalho N. J. M.   Cavaleiro A.  

Publisher: Edp Sciences

E-ISSN: 1286-0050|43|3|321-325

ISSN: 1286-0042

Source: EPJ Applied Physics (The), Vol.43, Iss.3, 2008-04, pp. : 321-325

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Abstract