Thickness and substrate effects on AlN thin film growth at room temperature

Author： Abdallah B.   Duquenne C.   Besland M. P.   Gautron E.   Jouan P. Y.   Tessier P. Y.   Brault J.   Cordier Y.   Djouadi M. A.  

Publisher： Edp Sciences

E-ISSN： 1286-0050|43|3|309-313

ISSN： 1286-0042

Source： EPJ Applied Physics (The), Vol.43, Iss.3, 2008-05, pp. : 309-313

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