Effect of nitrogen addition on the properties of C:F thin films deposited by RF sputtering

Author: Gonon P.  

Publisher: Edp Sciences

E-ISSN: 1286-0050|32|1|15-21

ISSN: 1286-0042

Source: EPJ Applied Physics (The), Vol.32, Iss.1, 2005-10, pp. : 15-21

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