Deposition of DLC:H films by C-sputtering assisted CH4-Ar PE-CVD technique

Author: Yokota K.   Nakatani T.   Miyashita F.  

Publisher: Edp Sciences

E-ISSN: 1286-0050|39|1|17-21

ISSN: 1286-0042

Source: EPJ Applied Physics (The), Vol.39, Iss.1, 2007-06, pp. : 17-21

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