Impact of deposition parameters on the material quality of SPC poly-Si thin films using high-rate PECVD of a-Si:H

Author： Kumar Avishek   Widenborg Per Ingemar   Dalapati Goutam Kumar   Subramanian Gomathy Sandhya   Aberle Armin Gerhard  

Publisher： Edp Sciences

E-ISSN： 2105-0716|6|issue|65303-65303

ISSN： 2105-0716

Source： EPJ Photovoltaics, Vol.6, Iss.issue, 2015-05, pp. : 65303-65303

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