ALD gate dielectrics for improved threshold voltage stability in AlGaN/GaN MOS-HFETs for power applications

Publisher: IOP Publishing

E-ISSN: 1361-6641|30|12|125017-125023

ISSN: 0268-1242

Source: Semiconductor Science and Technology, Vol.30, Iss.12, 2015-12, pp. : 125017-125023

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