Determination of titanium atom and ion densities in sputter deposition plasmas by optical emission spectroscopy

Publisher: IOP Publishing

E-ISSN: 1361-6595|24|6|65022-65034

ISSN: 0963-0252

Source: Plasma Sources Science and Technology, Vol.24, Iss.6, 2015-12, pp. : 65022-65034

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