A review on the importance of surface coating of micro/nano-mold in micro/nano-molding processes

Author： Saha Biswajit   Liu Erjia   Hardt David E   Lee Junghoon   Saha Biswajit   Saha Biswajit  

Publisher： IOP Publishing

E-ISSN： 1361-6439|26|1|13002-13041

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.26, Iss.1, 2016-01, pp. : 13002-13041

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