Effect of gas properties on the dynamics of the electrical slope asymmetry effect in capacitive plasmas: comparison of Ar, H2 and CF4

Author: Bruneau B   Lafleur T   Gans T   O’Connell D   Greb A   Korolov I   Derzsi A   Donkó Z   Brandt S   Schüngel E   Schulze J   Diomede P   Economou D J   Longo S   Johnson E   Booth J-P  

Publisher: IOP Publishing

E-ISSN: 1361-6595|25|1|1LT02-6

ISSN: 0963-0252

Source: Plasma Sources Science and Technology, Vol.25, Iss.1, 2016-02, pp. : 1LT02-6

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Abstract