Control and optimization of the slope asymmetry effect in tailored voltage waveforms for capacitively coupled plasmas

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The electrical asymmetry effect in multi-frequency capacitively coupled radio frequency discharges

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The electrical asymmetry effect in capacitively coupled radio-frequency discharges

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The Electrical Asymmetry Effect - A novel and simple method for separate control of ion energy and flux in capacitively coupled RF discharges

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Radio-frequency capacitively coupled plasmas excited by tailored voltage waveforms: comparison of experiment and particle-in-cell simulations

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