Fabrication of grids and collimators using SU-8 as a mold

Author： Makarova O. V.   Zyryanov V. N.   Divan R.   Mancini D. C.   Tang C.-M.  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.10, Iss.6-7, 2004-10, pp. : 536-539

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