Temperature-dependent microtensile testing of thin film materials for application to microelectromechanical system

Author： Lin Ming-Tzer   El-Deiry Paul   Chromik Richard   Barbosa Nicholas   Brown Walter   Delph Terry   Vinci Richard  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.12, Iss.10-11, 2006-09, pp. : 1045-1051

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Related content

Design and development of sub-micron scale specimens with electroplated structures for the microtensile testing of thin films

By Lin Ming-Tzer   Tong Chi-Jia   Chiang Chung-Hsun  

Microsystem Technologies, Vol. 13, Iss. 11-12, 2007-07 ,pp. : 1559-1565

Springer Publishing Company

Access to resources Recommend Favorite

Problems and basic research directions in the field of thin-film nanoand microelectromechanical systems of pressure sensors

By Belozubov E.   Vasil’ev V.   Gromkov N.  

Automation and Remote Control, Vol. 72, Iss. 2, 2011-02 ,pp. : 417-424

MAIK Nauka/Interperiodica

Access to resources Recommend Favorite

Microfabrication of thin film temperature sensor for cryogenic measurement

By Jiang Shui-Dong   Liu Jing-Quan   Yang Bin   Zhu Hong-Ying   Yang Chun-Sheng  

Microsystem Technologies, Vol. 20, Iss. 3, 2014-03 ,pp. : 451-456

Springer Publishing Company

Access to resources Recommend Favorite

Polysilicon micro beams buckling with temperature-dependent properties

By Shamshirsaz M.  

Microsystem Technologies, Vol. 14, Iss. 7, 2008-07 ,pp. : 957-961

Springer Publishing Company

Access to resources Recommend Favorite

Assessment of testing methodologies for thin-film vacuum MEMS packages

By Li Qian  

Microsystem Technologies, Vol. 15, Iss. 1, 2009-01 ,pp. : 161-168

Springer Publishing Company

Access to resources Recommend Favorite