Design and modeling of electromagnetic actuator in mems-based valveless impedance pump

Author: Chang Hsien-Tsung   Lee Chia-Yen   Wen Chih-Yung  

Publisher: Springer Publishing Company

ISSN: 0946-7076

Source: Microsystem Technologies, Vol.13, Iss.11-12, 2007-07, pp. : 1615-1622

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