![](/images/ico/ico_close.png)
![](/images/ico/ico3.png)
Period of time: 2007年11-12期
Publisher: Springer Publishing Company
Founded in: 1995
Total resources: 27
ISSN: 0946-7076
Subject: TP Automation Technology , Computer Technology
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Microsystem Technologies,volume 13,issue 11-12
Menu
![](/images/ico/ico5.png)
Design, test, integration and packaging of MEMS/MOEMS, 2006
By Michel B.,Courtois B. in (2007)
Microsystem Technologies,volume 13,issue 11-12 , Vol. 13, Iss. 11-12, 2007-07 , pp.![](/images/ico/ico5.png)
A new generic surface micromachining module for MEMS hermetic packaging at temperatures below 200 °C
By Hellín Rico R.,Celis J.-P.,Baert K.,Hoof C.,Witvrouw A. in (2007)
Microsystem Technologies,volume 13,issue 11-12 , Vol. 13, Iss. 11-12, 2007-07 , pp.![](/images/ico/ico5.png)
A novel packaging approach for RF MEMS switching functions on alumina substrate
By El Khatib Mohamad,Pothier Arnaud,Crunteanu Aurelian,Blondy Pierre in (2007)
Microsystem Technologies,volume 13,issue 11-12 , Vol. 13, Iss. 11-12, 2007-07 , pp.![](/images/ico/ico5.png)
Au–Sn flip-chip solder bump for microelectronic and optoelectronic applications
By Yoon Jeong-Won,Chun Hyun-Suk,Koo Ja-Myeong,Jung Seung-Boo in (2007)
Microsystem Technologies,volume 13,issue 11-12 , Vol. 13, Iss. 11-12, 2007-07 , pp.![](/images/ico/ico5.png)
Ultra fine pitch flat panel display packaging using 3 μm conductive particles
By Wang G.,Lin Y.,Lin G. in (2007)
Microsystem Technologies,volume 13,issue 11-12 , Vol. 13, Iss. 11-12, 2007-07 , pp.![](/images/ico/ico5.png)
A novel contact resistance model of anisotropic conductive film for FPD packaging
By Wang G.,Lin Y.,Lin G. in (2007)
Microsystem Technologies,volume 13,issue 11-12 , Vol. 13, Iss. 11-12, 2007-07 , pp.![](/images/ico/ico5.png)
High quality factor copper inductors integrated in deep dry-etched quartz substrates
By Leroy C.,Pisani M.,Hibert C.,Bouvet D.,Puech M.,Ionescu A. in (2007)
Microsystem Technologies,volume 13,issue 11-12 , Vol. 13, Iss. 11-12, 2007-07 , pp.![](/images/ico/ico5.png)
Fabrication of silicon-on-insulator MEM resonators with deep sub-micron transduction gaps
By Ciressan Nicoleta,Hibert Cyrille,Mazza Marco,Ionescu Adrian in (2007)
Microsystem Technologies,volume 13,issue 11-12 , Vol. 13, Iss. 11-12, 2007-07 , pp.![](/images/ico/ico5.png)
Design of bossed silicon membranes for high sensitivity microphone applications
By Martins P.,Beclin S.,Brida S.,Metivet S.,Stojanovic O.,Malhaire C. in (2007)
Microsystem Technologies,volume 13,issue 11-12 , Vol. 13, Iss. 11-12, 2007-07 , pp.![](/images/ico/ico5.png)
Studies on a micro turbine device with both journal- and thrust-air bearings
By Shan X.,Zhang Q.,Sun Y.,Maeda R. in (2007)
Microsystem Technologies,volume 13,issue 11-12 , Vol. 13, Iss. 11-12, 2007-07 , pp.