Planar microreactor for biochemical application made from silicon and polymer films

Author： Utsumi Yuichi   Hitaka Yusuke   Matsui Katsuhiro   Takeo Masahiro   Negoro Seiji   Ukita Yoshiaki  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.13, Iss.5-6, 2007-03, pp. : 425-429

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