Fabrication of support structures to prevent SU-8 stiction in high aspect ratio structures

Author： Vora K.   Peele A.   Shew B.-Y.   Harvey E.   Hayes J.  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.13, Iss.5-6, 2007-03, pp. : 487-493

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