Process research of high aspect ratio microstructure using SU-8 resist

Author： Liu J.   Cai B.   Zhu J.   Ding G.   Zhao X.   Yang C.   Chen D.  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.10, Iss.4, 2004-05, pp. : 265-268

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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