Linearized analysis of the deformation of ultra-thin lubricant films under gas pressures by the long wave equation

Author： Fukui Shigehisa   Shimizu Soichi   Yamane Kiyomi   Matsuoka Hiroshige  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.13, Iss.8-10, 2007-05, pp. : 1339-1345

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