Probe recording technology using novel MEMS devices

Author： Yang J.   Mou J.   Chong N.   Lu Y.   Zhu H.   Jiang Q.   Kim W.   Chen J.   Guo G.   Ong E.  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.13, Iss.8-10, 2007-05, pp. : 733-740

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Related content

Preparation of sacrificial layer for MEMS devices by lift-off technology

By Yang Jie   Shi Yu   Zhong Hui   Jiao Xiangquan   Zhang Rui   Du Bo  

Microsystem Technologies, Vol. 20, Iss. 2, 2014-02 ,pp. : 259-263

Springer Publishing Company

Access to resources Recommend Favorite

The study of a novel crystal SiGeC far infrared sensor with thermal isolated by MEMS technology

By Hsieh M.   Fang Y.   Jair D.  

Microsystem Technologies, Vol. 12, Iss. 10-11, 2006-09 ,pp. : 999-1004

Springer Publishing Company

Access to resources Recommend Favorite

The fast-moving world of MEMS technology

By Bogue Robert  

Assembly Automation, Vol. 29, Iss. 4, 2009-09 ,pp. : 313-320

Emerald Group Publishing Ltd

Access to resources Recommend Favorite

From MEMS devices to smart integrated systems

By Soeraasen O.  

Microsystem Technologies, Vol. 14, Iss. 7, 2008-07 ,pp. : 895-901

Springer Publishing Company

Access to resources Recommend Favorite

Single mask fabrication process for movable MEMS devices

By Alamin Dow Ali   Gougam Adel   Kherani Nazir   Rangelow I.  

Microsystem Technologies, Vol. 20, Iss. 4-5, 2014-04 ,pp. : 955-961

Springer Publishing Company

Access to resources Recommend Favorite