Single mask fabrication process for movable MEMS devices

Author： Alamin Dow Ali   Gougam Adel   Kherani Nazir   Rangelow I.  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.20, Iss.4-5, 2014-04, pp. : 955-961

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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