Fabrication and characterization of a monolithic piezoelectric actuator for fiber coupling

Author： Bruchmann C.   Höfer B.   Schreiber P.   Eberhardt R.   Buss W.   Peschel T.   Gebhardt S.   Tünnermann A.   Beckert E.  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.14, Iss.4-5, 2008-04, pp. : 683-690

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Related content

Simulation of the Performance of a Piezoelectric Actuator Driven with a Current Pulse

By Furutani Katsushi   Furuta Atsushi  

Advanced Robotics, Vol. 24, Iss. 14, 2010-10 ,pp. : 1945-1961

Taylor & Francis Ltd

Access to resources Recommend Favorite

Circuit model for piezoelectric actuator with electrically conductive epoxy

By Liu Yanning   Wang Xin   Lu Yi  

Microsystem Technologies, Vol. 19, Iss. 9-10, 2013-09 ,pp. : 1559-1565

Springer Publishing Company

Access to resources Recommend Favorite

Effect of seed layer stress on the fabrication of monolithic MEMS microstructure

By Chung C.   Fang Y.   Cheng C.   Hong Y.   Wang C.  

Microsystem Technologies, Vol. 13, Iss. 3-4, 2007-02 ,pp. : 299-304

Springer Publishing Company

Access to resources Recommend Favorite

Fabrication of the monolithic polymer–metal microstructure by the backside exposure and electroforming technology

By Chung C.   Hong Y.   Chang W.  

Microsystem Technologies, Vol. 13, Iss. 5-6, 2007-03 ,pp. : 531-536

Springer Publishing Company

Access to resources Recommend Favorite

Design, fabrication and testing of a piezoelectric energy microgenerator

By Alamin Dow Ali   Bittner Achim   Schmid Ulrich   Kherani Nazir  

Microsystem Technologies, Vol. 20, Iss. 4-5, 2014-04 ,pp. : 1035-1040

Springer Publishing Company

Access to resources Recommend Favorite